IMAGING OF SUBMICRON INDEX VARIATIONS BY SCANNING OPTICAL TUNNELING

被引:35
作者
COURJON, D
BAINIER, C
SPAJER, M
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1992年 / 10卷 / 06期
关键词
D O I
10.1116/1.586036
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The scanning tunneling optical microscope (SNOM, STOM, PSTM, etc.) is the equivalent of the electron scanning tunneling microscope in the electromagnetic domain. Although it was born at the same time, its actual development is more recent. Here, some new results obtained with the version working in total reflection (STOM/PSTM) are reported. A grating of a periodicity of 417 nm and a thickness of 5 nm have been imaged both in TM and TE modes. It is first noted that the optical image is well resolved. Furthermore, the difference of behavior of the field versus the polarization of the incident light has been shown. More precisely, the TM mode seems to be highly sensitive to small index and topography variations due to surface contaminants. Such effects are generally not imaged by atomic force microscopy working in attractive mode, because they affect the surface topography slightly. The SNOM could be thus a very powerful tool for detecting pollutants over the surface of objects like glasses, lenses, gratings, etc., and in the biology domain.
引用
收藏
页码:2436 / 2439
页数:4
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