A 100-KV ION PROBE MICROFABRICATION SYSTEM WITH A TETRODE GUN

被引：31

作者：

CLEAVER, JRA

AHMED, H

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期

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D O I：

10.1116/1.571231

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：1145 / 1148

页数：4

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