PRACTICAL ISSUES IN SCHEDULING AND DISPATCHING IN SEMICONDUCTOR WAFER FABRICATION

被引：67

作者：

JOHRI, PK

机构：

[1] AT and T Bell Laboratories, Holmdel, NJ

来源：

JOURNAL OF MANUFACTURING SYSTEMS | 1993年 / 12卷 / 06期

关键词：

WAFER FABRICATION; SCHEDULING; DISPATCHING; MODELING;

D O I：

10.1016/0278-6125(93)90344-S

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Scheduling and dispatching in wafer fabrication is an unenviable task. This paper highlights the difficulties encountered in a real setting and describes theoretical and practical problems, many of which still need a satisfactory resolution. Research is applied more to examples than to models, and technical problems are presented that are difficult to solve even in an idealized setting.

引用

页码：474 / 485

页数：12

共 25 条

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