DETERMINATION OF EXCITED SPUTTERED ATOMS KINETIC-ENERGY AS A CONTRIBUTION TO THE UNDERSTANDING OF THE EXCITATION PHENOMENON IN THE SPUTTERING PROCESS

被引：6

作者：

AUCIELLO, O

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1982年 / 194卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(82)90579-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：549 / 553

页数：5

共 27 条

[1] EXPERIMENTAL-EVIDENCE FOR THE RECOIL SPUTTERING MECHANISM AS A SOURCE OF HIGH-ENERGY EXCITED SPUTTERED PARTICLES [J].

AUCIELLO, O .

PHYSICAL REVIEW B, 1981, 24 (07) :4065-4067

[2]

AUCIELLO O, UNPUB

[3]

BATTACHARYA RS, 1979, J PHYS D, V12, pL55

[4] OPTICAL RADIATION EMITTED AT HEAVY-ION BOMBARDMENT OF SOLIDS [J].

BRAUN, M ;

EMMOTH, B ;

MARTINSO.I .

PHYSICA SCRIPTA, 1974, 10 (03) :133-138

[5] SURFACE-NORMAL ENERGY-DISTRIBUTION OF SPUTTERED RECOILS [J].

CARTER, G ;

FISCHER, G ;

WEBB, R ;

DZIOBA, S ;

KELLY, R ;

AUCIELLO, O .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1979, 45 (1-2) :45-48

[6]

CHAPMAN GE, 1972, RADIAT EFF, V13, P121

[7]

DZIOBA S, 1981, NUCL INSTRUM METHODS, V182, P207, DOI 10.1016/0029-554X(81)90689-3

[8] KINETIC ENERGIES OF SPUTTERED EXCITED PARTICLES .1. ATOMS SPUTTERED FROM LI, LIF, AND NACL [J].

DZIOBA, S ;

AUCIELLO, O ;

KELLY, R .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 45 (3-4) :235-246

[9] ON THE KINETIC ENERGIES OF SPUTTERED EXCITED PARTICLES .2. THEORY AND APPLICATIONS TO GROUP-IIA FLUORIDES [J].

DZIOBA, S ;

KELLY, R .

SURFACE SCIENCE, 1980, 100 (01) :119-134

[10]

GABLA L, 1977, ACTA PHYS POL A, V51, P311

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