EVIDENCE FOR CATHODIC PROTECTION OF CRYSTALLOGRAPHIC FACETS FROM GAAS ETCHING PROFILES

被引：15

作者：

NOTTEN, PHL

KELLY, JJ

机构：

[1] Philips Research Lab, Eindhoven, Neth, Philips Research Lab, Eindhoven, Neth

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 02期

关键词：

D O I：

10.1149/1.2100476

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：444 / 448

页数：5

共 11 条

[1] INVESTIGATION OF PHOTOELECTROCHEMICAL CORROSION OF SEMICONDUCTORS .1.
FRESE, KW
MADOU, MJ
MORRISON, SR
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1980, 84 (24) : 3172 - 3178
[2] CRYSTALLINE STRUCTURE AND SURFACE REACTIVITY
GATOS, HC
[J]. SCIENCE, 1962, 137 (3527) : 311 - &
[3] MECHANISM OF GALLIUM ARSENIDE DECOMPOSITION BY OXIDIZING AGENTS
GERISCHER, H
WALLEMMA.I
[J]. ZEITSCHRIFT FUR PHYSIKALISCHE CHEMIE-FRANKFURT, 1969, 64 (1-4): : 187 - +
[4] UBER DEN MECHANISMUS DER ANODISCHEN AUFLOSUNG VON GALLIUMARSENID
GERISCHER, H
[J]. BERICHTE DER BUNSEN-GESELLSCHAFT FUR PHYSIKALISCHE CHEMIE, 1965, 69 (07): : 578 - +
[5] ELECTROCHEMICAL STUDY OF UNDERCUTTING DURING ETCHING OF DUPLEX METAL-FILMS
KELLY, JJ
MINJER, CHD
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (07) : 931 - 936
[6] HOLE INJECTION REACTIONS AND THE POTENTIAL DISTRIBUTION AT THE PARA-GAAS/ELECTROLYTE INTERFACE UNDER ANODIC POLARIZATION
KELLY, JJ
NOTTEN, PHL
[J]. ELECTROCHIMICA ACTA, 1984, 29 (05) : 589 - 596
[7] ETCHING PROFILES AT RESIST EDGES .1. MATHEMATICAL-MODELS FOR DIFFUSION-CONTROLLED CASES
KUIKEN, HK
KELLY, JJ
NOTTEN, PHL
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (06) : 1217 - 1226
[8] MECHANISM OF ELECTROCHEMICAL REDUCTION OF PERSULFATES AND HYDROGEN PEROXIDE
MEMMING, R
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (06) : 785 - &
[9] NOTTEN PHL, 1986, ELECTROCHIM ACTA
[10] THE N-GAAS ELECTROLYTE INTERFACE - EVIDENCE FOR SPECIFICITY IN LATTICE ION ELECTROLYTE INTERACTIONS, DEPENDENCE OF INTERFACIAL POTENTIAL DROPS ON CRYSTAL PLANE ORIENTATION TO THE ELECTROLYTE, AND IMPLICATIONS FOR SOLAR-ENERGY CONVERSION
RAJESHWAR, K
MRAZ, T
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1983, 87 (05) : 742 - 744

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