SILICONE POLYMER DEPOSITION BY CO2-LASER INDUCED DECOMPOSITION OF SILANE IN THE PRESENCE OF METHYL-METHACRYLATE

被引：8

作者：

ALEXANDRESCU, R

MORJAN, J

GRIGORIU, C

MIHAILESCU, IN

BASTL, Z

TLASKAL, J

MAYER, R

POLA, J

机构：

[1] HEYROVSKY INST PHYS CHEM & ELECTROCHEM,CS-11840 PRAGUE 1,CZECHOSLOVAKIA

[2] INST INORGAN CHEM,CS-25068 REZ,CZECHOSLOVAKIA

[3] INST CHEM PROC FUNDAMENTALS,CS-16502 PRAGUE 6,CZECHOSLOVAKIA

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1988年 / 46卷 / 04期

关键词：

D O I：

10.1007/BF01141592

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：275 / 279

页数：5

相关论文

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