A LASER-GENERATED PLASMA SOURCE FOR X-RAY-LITHOGRAPHY AND VLSI

被引：4

作者：

MICHETTE, AG

ROGOYSKI, AM

BURGE, RE

机构：

[1] King's Coll, United Kingdom

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1988年 / 21卷 / 10期

关键词：

INTEGRATED CIRCUITS; VLSI--Laser Applications - LASERS; EXCIMER--Applications - LITHOGRAPHY--Laser Applications - X-RAYS--Measurements;

D O I：

10.1088/0022-3735/21/10/011

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Plasma sources based on small, commercially available, Nd:YAG and KrF excimer lasers are described, with particular emphasis on the potential use of such sources in x-ray lithograpy. The results obtained from the characterization of prototype systems are extrapolated to allow the specification of a source that could be used in a production system, and the predicted properties of this source are compared with other possibilities for x-ray lithography.

引用

页码：959 / 965

页数：7

共 14 条

[1]

BUCKLEY CJ, 1985, P SOC PHOTO-OPT INST, V537, P213, DOI 10.1117/12.947504

[2] LASER-PRODUCED CONTINUA FOR ABSORPTION-SPECTROSCOPY IN THE VUV AND XUV [J].

CARROLL, PK ;

KENNEDY, ET ;

OSULLIVAN, G .

APPLIED OPTICS, 1980, 19 (09) :1454-1462

[3]

Choi P., 1986, P SOC PHOTO-OPT INS, V0733, P52, DOI 10.1117/12.964948

[4] LASER-GENERATED PLASMA AS SOFT-X-RAY SOURCE [J].

GERRITSEN, HC ;

VANBRUG, H ;

BIJKERK, F ;

VANDERWIEL, MJ .

JOURNAL OF APPLIED PHYSICS, 1986, 59 (07) :2337-2344

[5] SOFT-X-RAY LITHOGRAPHY USING RADIATION FROM LASER-PRODUCED PLASMAS [J].

GOHIL, P ;

KAPOOR, H ;

MA, D ;

PEKERAR, MC ;

MCILRATH, TJ ;

GINTER, ML .

APPLIED OPTICS, 1985, 24 (13) :2024-2027

[6]

Henke B. L., 1982, Atomic Data and Nuclear Data Tables, V27, P1, DOI 10.1016/0092-640X(82)90002-X

[7] SOFT-X-RAY CONTACT MICROSCOPY USING LASER PLASMA SOURCES [J].

MICHETTE, AG ;

CHENG, PC ;

EASON, RW ;

FEDER, R ;

ONEILL, F ;

OWADANO, Y ;

ROSSER, RJ ;

RUMSBY, P ;

SHAW, MJ .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1986, 19 (03) :363-&

[8]

MICHETTE AG, 1988, IN PRESS XRAY MICROS, V2

[9]

NAGEL DJ, 1984, VLSI ELECTONICS, V8

[10] ENERGY CONFINEMENT EFFECT ON SOFT-X-RAY GENERATION IN 0.53-MU-M LASER-HEATED CAVITY TARGET [J].

OKADA, K ;

MOCHIZUKI, T ;

IKEDA, N ;

HAMADA, M ;

MINEO, M ;

KODAMA, R ;

YAMANAKA, C .

JOURNAL OF APPLIED PHYSICS, 1986, 59 (07) :2332-2336

← 1 2 →