COLOR SEPARATION BY USE OF BINARY OPTICS

被引:62
作者
FARN, MW
STERN, MB
VELDKAMP, WB
MEDEIROS, SS
机构
[1] Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, MA, 02173-9108, HW45-108
关键词
D O I
10.1364/OL.18.001214
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We describe the preliminary design, fabrication, and demonstration of an array of micro-optics that is used to separate colors locally on the focal plane. The 64 x 64 array combines 100 mum x 100 mum, F/2 refractive microlenses with a 17-mum period grating. The microlenses concentrate the incoming radiation, while the grating disperses the radiation according to wavelength. The element, with a minimum feature size of 1 mum and total depth of 8 mum, is fabricated on a silicon wafer (for use in the 8-12-mum band) by means of a nonstandard binary-optics process.
引用
收藏
页码:1214 / 1216
页数:3
相关论文
共 7 条
[1]  
CROSS EF, 1983, P SOC PHOTO-OPT INST, V366, P10, DOI 10.1117/12.934227
[2]  
FARN MW, 1992, P SOC PHOTO-OPT INST, V1751, P106
[3]  
Kingslake R., 1978, LENS DESIGN FUNDAMEN, P77
[4]   DEEP 3-DIMENSIONAL MICROSTRUCTURE FABRICATION FOR INFRARED BINARY OPTICS [J].
STERN, MB ;
MEDEIROS, SS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06) :2520-2525
[5]   FABRICATING BINARY OPTICS - PROCESS VARIABLES CRITICAL TO OPTICAL-EFFICIENCY [J].
STERN, MB ;
HOLZ, M ;
MEDEIROS, SS ;
KNOWLDEN, RE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06) :3117-3121
[6]  
STERN MB, 1991, MATER RES SOC SYMP P, V216, P107
[7]  
WERNER T, 1991, P SOC PHOTO-OPT INS, V1544, P46, DOI 10.1117/12.49372