IMPURITY GENERATION DUE TO NONTHERMAL ELECTRONS AND ITS CONTROL BY EXTERNAL BIAS

被引：7

作者：

TAKAMURA, S

SATO, A

SHEN, Y

OKUDA, T

机构：

[1] Nagoya Univ, Nagoya, Jpn, Nagoya Univ, Nagoya, Jpn

来源：

JOURNAL OF NUCLEAR MATERIALS | 1987年 / 149卷 / 02期

关键词：

D O I：

10.1016/0022-3115(87)90479-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：212 / 217

页数：6

共 17 条

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