INFLUENCE OF THE SURFACE-ROUGHNESS ON THE DETERMINATION OF THE OPTICAL-PARAMETERS OF SNO2 THIN-FILMS

被引：13

作者：

ARDEBILI, R ^{[1
]}

CHARLES, JP ^{[1
]}

MARTIN, L ^{[1
]}

MARUCCHI, J ^{[1
]}

MANIFACIER, JC ^{[1
]}

机构：

[1] UNIV MONTPELLIER 2,ETUDE SEMICOND GRP,F-34095 MONTPELLIER 05,FRANCE

来源：

MATERIALS RESEARCH BULLETIN | 1990年 / 25卷 / 11期

关键词：

D O I：

10.1016/0025-5408(90)90224-P

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

SnO2 and In2O3 thin films prepared on a heated substrate by a chemical spray method show an important surface roughness when the thicknesses are in excess of a few hundred nanometers. This, in turn, strongly affects the measurements of the index of refraction n, and the coefficient of extinction k, deduced from transmittance and reflectance spectra. In particular, values determined for n are greatly underestimated. It is shown here that, after mechanical polishing of the surface layer, reproducible values of the optical parameters are obtained. The thicknesses measured using the interference fringe pattern are in good agreement with mechanical determinations made by profilometry. © 1990.

引用

页码：1407 / 1413

页数：7

共 21 条

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