DESIGN AND IMPLEMENTATION OF AN INEXPENSIVE TARGET SCANNER FOR THE GROWTH OF THIN-FILMS BY THE LASER-ABLATION PROCESS

被引：3

作者：

RAO, AM ^{[1
]}

MOODERA, JS ^{[1
]}

机构：

[1] MIT,FRANCIS BITTER NATL MAGNET LAB,CAMBRIDGE,MA 02139

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1991年 / 62卷 / 04期

关键词：

D O I：

10.1063/1.1142018

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The design of target scanner that is inexpensive and easy to construct is described. Our target scanner system does not require an expensive personal computer to raster the laser beam uniformily over the target material, unlike the computer driven target scanners that are currently being used in the thin-film industry. The main components of our target scanner comprise a bidirectional motor, a two-position switch, and a standard optical mirror mount.

引用

页码：1107 / 1108

页数：2