INTEGRATED OPTICAL GRATING SCALE READOUT EMPLOYING A DOUBLE GRATING

被引：4

作者：

GEH, B

DORSEL, A

机构：

[1] Carl Zeiss, Oberkochen, D-7082

来源：

APPLIED OPTICS | 1992年 / 31卷 / 25期

关键词：

GRATING COUPLER; INTEGRATED OPTICS; READING HEAD;

D O I：

10.1364/AO.31.005241

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A reading head empolying a double grating in a monomode waveguide for the interferometric readout of grating scales is proposed and demonstrated. A theoretical analysis employing a ray-tracing program that includes wave-front data output shows promising insensitivity to deviations from the design data for this device. Experimental results for a laboratory setup are presented.

引用

页码：5241 / 5245

页数：5

共 5 条

[1] GRATING COUPLER FOR EFFICIENT EXCITATION OF OPTICAL GUIDED WAVES IN THIN FILMS [J].