ASPECTS OF QUANTIFICATION OF OFF-RESONANCE LASER IONIZATION FOR SNMS

被引：13

作者：

KAESDORF, S

SCHRODER, H

KOMPA, KL

机构：

[1] Max-Planck-Institut für Quantenoptik

来源：

VACUUM | 1990年 / 41卷 / 7-9期

关键词：

D O I：

10.1016/0042-207X(90)94049-V

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ionization experiments of sputtered neutral atoms have been performed using a KrF excimer laser in conjunction with an energy-selective mass spectrometer. Off-resonance laser ionization has promising perspectives for SNMS (Sputtered Neutrals Mass Spectrometry) because most elements can be ionized with similar efficiency. Focusing geometries were found which lead to a true saturation plateau of multi-photon ionization.

引用

页码：1669 / 1670

页数：2

共 7 条

[1] SURFACE-ANALYSIS BY NONRESONANT MULTIPHOTON IONIZATION OF DESORBED OR SPUTTERED SPECIES [J].