MASS-SPECTROMETRIC ANALYSIS OF SPUTTER GAS ATMOSPHERE WITHOUT PRESSURE REDUCTION SYSTEM

被引：13

作者：

VISSER, J ^{[1
]}

机构：

[1] PHILIPS RES LABS,EINDHOVEN,NETHERLANDS

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 03期

关键词：

D O I：

10.1116/1.1317089

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：464 / 471

页数：8

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