IMPURITY INDUCED LAYER DISORDERING OF SI IMPLANTED ALXGA1-XAS-GAAS QUANTUM-WELL HETEROSTRUCTURES - LAYER DISORDERING VIA DIFFUSION FROM EXTRINSIC DISLOCATION LOOPS

被引:17
作者
GUIDO, LJ
HSIEH, KC
HOLONYAK, N
KALISKI, RW
EU, V
FENG, M
BURNHAM, RD
机构
[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
[2] FORD MICROELECTR INC,COLORADO SPRINGS,CO 80908
[3] XEROX CORP,PALO ALTO RES CTR,PALO ALTO,CA 94304
关键词
D O I
10.1063/1.338111
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1329 / 1334
页数:6
相关论文
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