PREFERENTIAL SPUTTERING OF B STUDIED BY LOW-ENERGY ION-SCATTERING USING THE DUAL-ISOTOPE SURFACE-COMPOSITION (DISK) METHOD

被引：12

作者：

ACKERMANS, PAJ ^{[1
]}

CREUWELS, MAP ^{[1
]}

BRONGERSMA, HH ^{[1
]}

SCANLON, PJ ^{[1
]}

机构：

[1] QUEENS UNIV,DEPT PHYS,KINGSTON K7L 3N6,ONTARIO,CANADA

来源：

SURFACE SCIENCE | 1990年 / 227卷 / 03期

关键词：

D O I：

10.1016/S0039-6028(05)80024-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Low-Energy Ion Scattering (LEIS) is a well known technique for obtaining information about the outermost layer of a surface. The Dual-Isotope Surface Composition (DISC) method for quantification of atomic compositions, which does not require the use of calibration samples, is presented in this article. This method is used to study the preferential sputtering of a natural boron sample (20% 10B and 80% 11B). Using 3.5 keV 4He+ ions the surface concentration of 10B is found to be (16 ± 2)%. © 1990 Elsevier Science Publishers B.V. (North-Holland).

引用

页码：361 / 368

页数：8

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