SCREENING OF METAL FILM DEFECTS BY CURRENT NOISE MEASUREMENTS

被引：23

作者：

VOSSEN, JL ^{[1
]}

机构：

[1] RCA CORP,DAVID SARNOFF RES CTR,PRINCETON,NJ 08540

来源：

关键词：

D O I：

10.1063/1.1654891

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：287 / 289

页数：3

共 13 条

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[4] ELECTROMIGRATION-INDUCED FAILURES IN ALUMINUM FILM CONDUCTORS [J].

BLAIR, JC ;

GHATE, PB ;

HAYWOOD, CT .

[5]

CONRAD GT, 1960, IRE T COMPONENT PART, VCP 7, P71

[6]

CROSTHWAIT DL, 1973 REL PHYS S LAS

[7]

CURTIS JG, 1961, ELECTRONICS, V34, P100

[8]

HOOGE FN, 1972, PHYSICA, V60, P13

[9]

KERN W, 1973 REL PHYS S

[10]

KIRBY PL, 1965, ELECTRON ENG, V37, P722