DEVICE FOR DISPERSAL OF MICROMETER-SIZED AND SUBMICROMETER-SIZED PARTICLES IN VACUUM

被引：104

作者：

SHEEHAN, DP ^{[1
]}

CARILLO, M ^{[1
]}

HEIDBRINK, W ^{[1
]}

机构：

[1] UNIV CALIF IRVINE,DEPT PHYS,IRVINE,CA 92717

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 12期

关键词：

D O I：

10.1063/1.1141515

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A simple, versatile device for dispersing micrometer- and submicrometer-sized particles in vacuum is described. The source allows control of particle size (0.5 μm≤l≤200 μm) and particle flux density up to roughly 107 cm-2 s-1. Several types of microparticles were successfully dispersed.

引用

页码：3871 / 3875

页数：5

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