SPUTTERING OF TITANIUM CARBIDE COATINGS UNDER D+ AND HE-4(+) ION-BOMBARDMENT - TOTAL SPUTTER YIELDS AND ANGULAR-DISTRIBUTION

被引：7

作者：

KAMINSKY, M

NIELSEN, R

机构：

来源：

THIN SOLID FILMS | 1981年 / 83卷 / 01期

关键词：

D O I：

10.1016/0040-6090(81)90592-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：107 / 114

页数：8

共 16 条

[1] SPUTTERING YIELDS OF GRAPHITE AND CARBIDES AND THEIR POTENTIAL USE AS 1ST WALL MATERIALS [J].

BOHDANSKY, J ;

BAY, HL ;

OTTENBERGER, W .

JOURNAL OF NUCLEAR MATERIALS, 1978, 76-7 (1-2) :163-167

[2] DEUTERIUM AND HELIUM ION IRRADIATION EFFECTS ON TIB2 COATINGS [J].

DAS, SK ;

KAMINSKY, M .

THIN SOLID FILMS, 1979, 63 (02) :269-275

[3]

GLANG R, 1970, HDB THIN FILM TECHNO, P1

[4] PLASMA CONTAMINATION AND WALL EROSION IN THERMONUCLEAR REACTORS [J].

KAMINSKY, M .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1971, NS18 (04) :208-&

[5] SURFACE DAMAGE OF TIB2 AND C COATINGS UNDER ENERGETIC D+ AND HE-4(+) IRRADIATIONS [J].

KAMINSKY, M ;

DAS, SK .

JOURNAL OF NUCLEAR MATERIALS, 1979, 85-6 (DEC) :1095-1100

[6] SPUTTERING OF TIB2 COATINGS UNDER D+ AND HE-4(+) ION-BOMBARDMENT [J].

KAMINSKY, M ;

LAM, SK ;

MOY, K .

THIN SOLID FILMS, 1980, 73 (01) :91-97

[7]

KAMINSKY M, 1975, PLASMA PHYS CONTROLL, V2, P287

[8]

KAMINSKY M, 1965, ATOMIC IONIC IMPACT, P222

[9]

KAMINSKY M, 1978, I PHYS C SER, V38, P305

[10] SPUTTERING OF ANNEALED ALUMINUM AND OF SINTERED ALUMINUM POWDER (SAP 895) UNDER D+ AND 4HE+ BOMBARDMENT - STUDY OF MICROSTRUCTURAL EFFECTS [J].

LAM, SK ;

KAMINSKY, M .

JOURNAL OF NUCLEAR MATERIALS, 1980, 89 (2-3) :205-220

← 1 2 →