A 3-DIMENSIONAL MEASURING METHOD FOR MAGNETIC STRAY FIELDS

Reconstruction of three-dimensional micro- stray magnetic fields from a set of deflection data of electron probes deflected by the Lorentz force when passing through the object magnetic field is described. In this paper, we propose a new reconstruction technique based on the ART (Algebraic Reconstruction Technique) iterative method for electron beam tomography. In computer simulation, our algorithm is tested with a model example of an one-turn coil, and the achievable resolution is discussed. Our algorithm is also checked experimentally with an one-turn coil and a commercial magnetic head. From these results, it is shown that our method is applicable to high intensity magnetic field reconstruction problems in electron beam tomography. © 1990 IEEE