SELECTIVE DEPOSITION OF DIAMOND FILMS

被引：67

作者：

DAVIDSON, JL

ELLIS, C

RAMESHAM, R

机构：

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1989年 / 18卷 / 06期

关键词：

D O I：

10.1007/BF02657523

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：711 / 715

页数：5

共 19 条

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