TRANSIENT SIMULATIONS OF CONVECTION AND SOLUTE SEGREGATION OF GAAS GROWTH IN GRADIENT FREEZE FURNACE

被引:33
作者
KIM, DH [1 ]
BROWN, RA [1 ]
机构
[1] MIT,CTR MAT PROC,CAMBRIDGE,MA 02139
基金
美国国家科学基金会;
关键词
D O I
10.1016/0022-0248(91)90158-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Transient numerical simulations are reported for the growth of selenium-doped gallium arsenide in a prototype of the vertical gradient freeze system built by GTE Laboratories. The simulations show that the combined effects of latent heat release and the small axial temperature gradient indicative of gradient freeze systems lead to a continuously varying growth rate and large deflections of the melt/crystal interface. Intense laminar convection in the melt is driven by the resulting radial temperature gradients and causes vigorous mixing of the dopant everywhere except near the interface at the center of the ampoule. This spatial nonuniformity in the flow leads to large radial segregation. Axial segregation of the dopant resembles the prediction of the stagnant film model, but cannot be quantitatively correlated with this expression.
引用
收藏
页码:66 / 74
页数:9
相关论文
共 14 条
[1]   CONVECTION AND SEGREGATION IN DIRECTIONAL SOLIDIFICATION OF DILUTE AND NON-DILUTE BINARY-ALLOYS - EFFECTS OF AMPOULE AND FURNACE DESIGN [J].
ADORNATO, PM ;
BROWN, RA .
JOURNAL OF CRYSTAL GROWTH, 1987, 80 (01) :155-190
[2]  
ARNOLD WA, 1990, 28TH AIAA AER SCI M
[3]   MODELING OF DIRECTIONAL SOLIDIFICATION - FROM SCHEIL TO DETAILED NUMERICAL-SIMULATION [J].
BROWN, RA ;
KIM, DH .
JOURNAL OF CRYSTAL GROWTH, 1991, 109 (1-4) :50-65
[4]  
Carslaw H. S., 1986, CONDUCTION HEAT SOLI
[5]  
CHAIT A, COMMUNICATION
[6]  
Ghandhi S.K, 1995, VLSI FABRICATION PRI
[7]  
JORDAN AS, 1986, J CRYST GROWTH, V76, P243
[8]  
KAFALAS JA, 1986, 6TH EUR S MAT SCI MI
[9]   TEMPERATURE-DEPENDENCE OF VISCOSITY OF MOLTEN GAAS BY AN OSCILLATING CUP METHOD [J].
KAKIMOTO, K ;
HIBIYA, T .
APPLIED PHYSICS LETTERS, 1987, 50 (18) :1249-1250
[10]  
KIM DH, 1990, THESIS MIT