FACTORS DETERMINING THE COMPOUND PHASES FORMED BY OXYGEN OR NITROGEN IMPLANTATION IN METALS

被引：59

作者：

KELLY, R

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 03期

关键词：

D O I：

10.1116/1.571825

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：778 / 789

页数：12

共 125 条

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