HIGH-SPATIAL-RESOLUTION ELEMENTAL MAPPING OF MULTILAYERS USING A FIELD-EMISSION TRANSMISSION ELECTRON-MICROSCOPE EQUIPPED WITH AN IMAGING FILTER

被引：17

作者：

KIMOTO, K ^{[1
]}

HIRANO, T ^{[1
]}

USAMI, K ^{[1
]}

HOSHIYA, H ^{[1
]}

机构：

[1] HITACHI LTD, CENT RES LAB, HITACHI, IBARAKI 31912, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1994年 / 33卷 / 11B期

关键词：

FIELD EMISSION TRANSMISSION ELECTRON MICROSCOPE (FE-TEM); ELECTRON ENERGY LOSS SPECTROSCOPY (EELS); ENERGY FILTER; IMAGING FILTER; MULTILAYER; X-RAY REFLECTIVITY;

D O I：

10.1143/JJAP.33.L1642

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Elemental mapping with about 1 nm spatial resolution has been achieved using a field emission transmission electron microscope (FE-TEM) equipped with an imaging filter. Chromium mapping is carried out with the Cr L2,3 core-loss edge (575 eV). Chromium layers a few nanometers in thickness can be clearly observed. The obtained thicknesses are compared with results of X-ray reflectivity, and they show good agreement.

引用

页码：L1642 / L1644

页数：3

共 10 条

[1] Ahn C.C., 1983, EELS ATLAS
[2] GIANT MAGNETORESISTANCE OF (001)FE/(001) CR MAGNETIC SUPERLATTICES
BAIBICH, MN
BROTO, JM
FERT, A
VANDAU, FN
PETROFF, F
EITENNE, P
CREUZET, G
FRIEDERICH, A
CHAZELAS, J
[J]. PHYSICAL REVIEW LETTERS, 1988, 61 (21) : 2472 - 2475
[3] MAGNETOTRANSPORT PROPERTIES OF MAGNETICALLY SOFT SPIN-VALVE STRUCTURES
DIENY, B
SPERIOSU, VS
METIN, S
PARKIN, SSP
GURNEY, BA
BAUMGART, P
WILHOIT, DR
[J]. JOURNAL OF APPLIED PHYSICS, 1991, 69 (08) : 4774 - 4779
[4] APPLICATIONS OF A POSTCOLUMN IMAGING FILTER IN BIOLOGY AND MATERIALS SCIENCE
GUBBENS, AJ
KRIVANEK, OL
[J]. ULTRAMICROSCOPY, 1993, 51 (1-4) : 146 - 159
[5] EFFECT OF ANNEALING ON THE INTERFACES OF GIANT-MAGNETORESISTANCE SPIN-VALVE STRUCTURES
HUANG, TC
NOZIERES, JP
SPERIOSU, VS
GURNEY, BA
LEFAKIS, H
[J]. APPLIED PHYSICS LETTERS, 1993, 62 (13) : 1478 - 1480
[6] DESIGN AND 1ST APPLICATIONS OF A POSTCOLUMN IMAGING FILTER
KRIVANEK, OL
GUBBENS, AJ
DELLBY, N
MEYER, CE
[J]. MICROSCOPY MICROANALYSIS MICROSTRUCTURES, 1992, 3 (2-3): : 187 - 199
[7] DEVELOPMENTS IN EELS INSTRUMENTATION FOR SPECTROSCOPY AND IMAGING
KRIVANEK, OL
GUBBENS, AJ
DELLBY, N
[J]. MICROSCOPY MICROANALYSIS MICROSTRUCTURES, 1991, 2 (2-3): : 315 - 332
[8] OSCILLATION OF PREFERRED ORIENTATION WITH THICKNESS OF CU LAYER IN NI-FE/CU MULTILAYERS
NAKATANI, R
DEI, T
SUGITA, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1992, 31 (10A): : L1417 - L1418
[9] OSCILLATIONS IN EXCHANGE COUPLING AND MAGNETORESISTANCE IN METALLIC SUPERLATTICE STRUCTURES - CO/RU, CO/CR, AND FE/CR
PARKIN, SSP
MORE, N
ROCHE, KP
[J]. PHYSICAL REVIEW LETTERS, 1990, 64 (19) : 2304 - 2307
[10] STUDY OF X-RAY REFLECTIVITY FROM SI FILM INTERFACE LAYER SI SUBSTRATE AND APPLICATION TO LOW-TEMPERATURE EPITAXIALLY GROWN SI/SI SUBSTRATE
USAMI, K
KOBAYASHI, N
MIYAUCHI, A
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (07): : 3312 - 3316

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