DEVELOPMENT OF ALIGNMENT TECHNIQUES FOR FABRICATION OF MICROELECTRIC DEVICES

被引：4

作者：

SPRINGER, RM

HARRIS, DH

机构：

[1] Autonetics Division of North American Rockwell Corporation, Anaheim, California

来源：

HUMAN FACTORS | 1969年 / 11卷 / 02期

关键词：

D O I：

10.1177/001872086901100213

中图分类号：

B84 [心理学]; C [社会科学总论]; Q98 [人类学];

学科分类号：

03 ; 0303 ; 030303 ; 04 ; 0402 ;

摘要：

Alternative visual systems for aligning successive circuit patterns in the fabrication of microelectronic devices were developed and evaluated. The experimental evaluation was conducted under both laboratory and production conditions. The study resulted in an optimal alignment mark system in terms of both alignment accuracy and speed. © 1969, Human Factors and Ergonomics Society. All rights reserved.

引用

页码：189 / &