NITRIDATION OF POLYCRYSTALLINE TITANIUM AS STUDIED BY INSITU ANGLE-RESOLVED X-RAY PHOTOELECTRON-SPECTROSCOPY

被引：41

作者：

ERMOLIEFF, A ^{[1
]}

BERNARD, P ^{[1
]}

MARTHON, S ^{[1
]}

WITTMER, P ^{[1
]}

机构：

[1] INST NATL SCI APPL LYON,F-69621 VILLEURBANNE,FRANCE

来源：

SURFACE AND INTERFACE ANALYSIS | 1988年 / 11卷 / 11期

关键词：

CHEMICAL REACTIONS - SPECTROSCOPY; ELECTRON; -; SPECTROSCOPY; X-RAY;

D O I：

10.1002/sia.740111105

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Nitridation of polycrystalline titanium was investigated in situ at about 550 degree C by angle-resolved x-ray photoelectron spectroscopy (XPS). The nitrogen pressure was varied from 10** minus **4 mbar to 1 mbar. The distribution of nitrogen in the titanium and the chemical bonding present were deduced from XPS measurements. Titanium nitridation passes through several stages as a function of the nitrogen exposure. The nitrogen concentration varies linearly with the logarithm of pressure and dose. Using the modified Ritchie-Hund theory it was shown that the kinetics of titanium nitridation follows a cubic law.

引用

页码：563 / 568

页数：6

共 27 条

[1] XPS - ENERGY CALIBRATION OF ELECTRON SPECTROMETERS .1. AN ABSOLUTE, TRACEABLE ENERGY CALIBRATION AND THE PROVISION OF ATOMIC REFERENCE LINE ENERGIES [J].