ADHESION EVALUATION OF RF-SPUTTERED ALUMINUM-OXIDE AND TITANIUM CARBIDE THICK-FILMS GROWN ON CARBIDE TOOLS

被引：12

作者：

SUMOMOGI, T ^{[1
]}

KUWAHARA, K ^{[1
]}

FUJIYAMA, H ^{[1
]}

机构：

[1] FUKUOKA INST TECHNOL,FUKUOKA,JAPAN

来源：

THIN SOLID FILMS | 1981年 / 79卷 / 01期

关键词：

D O I：

10.1016/0040-6090(81)90432-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：91 / 100

页数：10

共 12 条

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WEAVER, C .

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[2]

BOWDEN FP, 1964, FRICTION LUBRICATI 2, P325

[3] XPS STUDY OF THE ADHERENCE OF REFRACTORY CARBIDE, SILICIDE, AND BORIDE RF-SPUTTERED WEAR-RESISTANT COATINGS [J].

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WHEELER, DR .

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[4]

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[5] METAL OXYCARBIDES AS CUTTING TOOL MATERIALS [J].

CARSON, WW ;

LEUNG, CL ;

SUH, NP .

JOURNAL OF ENGINEERING FOR INDUSTRY-TRANSACTIONS OF THE ASME, 1976, 98 (01) :279-286

[6] FRICTION AND WEAR RESULTS FROM WC+CO COATINGS BY -DC-BIASED RF SPUTTERING IN A HELIUM ATMOSPHERE [J].

ESER, E ;

OGILVIE, RE ;

TAYLOR, KA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02) :401-405

[7] EFFECTS OF SUBSTRATE ORIENTATION AND ROTATION ON INTERNAL-STRESSES IN SPUTTERED METAL-FILMS [J].

HOFFMAN, DW ;

THORNTON, JA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :134-137

[8] MEASUREMENT OF ADHESION OF THIN EVAPORATED FILMS ON GLASS SUBSTRATES BY MEANS OF DIRECT PULL METHOD [J].

JACOBSSON, R ;

KRUSE, B .

THIN SOLID FILMS, 1973, 15 (01) :71-77

[9]

KUWAHARA K, 1968, T JPN I MET, VS 9, P1034

[10]

KUWAHARA K, 1980, B JPN SOC PREC ENG, V14, P165

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