WET-PROCESS SURFACE MODIFICATION OF DIELECTRIC POLYMERS - ADHESION ENHANCEMENT AND METALLIZATION

被引:72
作者
LEE, KW [1 ]
VIEHBECK, A [1 ]
机构
[1] IBM CORP,DIV RES,THOMAS J WATSON RES CTR,ADV POLYMER MAT & PROC GRP,YORKTOWN HTS,NY 10598
关键词
D O I
10.1147/rd.384.0457
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
For many electronic applications, the surface of a dielectric polymer must be modified to obtain the desired surface properties, such as wetting, adhesion, and moisture barrier, without altering the bulk properties. This paper reviews wet-process modifications of dielectric polymer surfaces and also presents unpublished results related to fluorinated polyimides. In a typical wet process, a substrate is immersed in or sprayed with a chemical solution, rinsed with a solvent to remove the excess reagents, and then dried if necessary. Wet processing can provide greatly enhanced adhesion and reliability of the adherate (top) layer to the modified polymer surface (adherend). We discuss a) the wet-process modification of various polymers (e.g., PMDA-ODA, BPDA-PDA, 6FDA-ODA, PTFE, PCTFE); b) polylmide/polyimide and PCTFE/glass adhesion, and c) the surface chemistry and the adhesion at a fluorinated polyimide (6FDA-ODA) surface. Entanglement of polymer chains plays an important role in polyimide/polyimide adhesion, while chemical reactions are the major contributors to PCTFE/glass adhesion strength. The metallization of dielectric substrates often requires surface pretreatments or conditioning by wet processes to sensitize a polymer surface for deposition of a metal seed layer. After seeding, a thick layer of a conducting metal (e.g., Cu) is deposited by electroless or electrolytic plating. Unlike dry or high-vacuum processing of polymer surfaces, the chemistry of a wet-processed polymer surface can be well characterized and often defined at a molecular level. A relationship can be established between a polymer's surface chemical (or morphological) structure and its surface properties such as adhesion and metallization.
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收藏
页码:457 / 474
页数:18
相关论文
共 56 条
[1]  
ANDRADE JD, 1988, SURFACE INTERFACIAL, pCH2
[2]  
BARD SL, 1989, Patent No. 4846929
[3]   CONTROL OF WETTABILITY OF POLYMERS USING ORGANIC-SURFACE CHEMISTRY [J].
BEE, TG ;
CROSS, EM ;
DIAS, AJ ;
LEE, KW ;
SHOICHET, MS ;
MCCARTHY, TJ .
JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY, 1992, 6 (06) :719-731
[4]  
Benderly A.A., 1962, J APPL POLYM SCI, V6, P221, DOI [10.1002/app.1962.070062017, DOI 10.1002/APP.1962.070062017]
[5]   SURFACE MODIFICATION OF POLY(TETRAFLUOROETHYLENE-CO-HEXAFLUOROPROPYLENE) - INTRODUCTION OF ALCOHOL FUNCTIONALITY [J].
BENING, RC ;
MCCARTHY, TJ .
MACROMOLECULES, 1990, 23 (10) :2648-2655
[6]   ANNEALING AND REORGANIZATION OF SULFONATED POLYETHYLENE FILMS TO PRODUCE SURFACE-MODIFIED FILMS OF VARYING HYDROPHILICITY [J].
BERGBREITER, DE ;
KABZA, K .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1991, 113 (04) :1447-1448
[7]  
Bessonov M. I., 1987, POLYIMIDES THERMALLY
[8]   DIFFUSION AND SELF-ADHESION OF THE POLYIMIDE PMDA-ODA [J].
BROWN, HR ;
YANG, ACM ;
RUSSELL, TP ;
VOLKSEN, W ;
KRAMER, EJ .
POLYMER, 1988, 29 (10) :1807-1811
[9]  
BUCHWALTER PL, 1984, POLYIMIDES SYNTHESIS, V1, P537
[10]  
Chapman B., 1980, GLOW DISCHARGE PROCE