Nd:YAG-laser-induced wet chemical etching of titanium and stainless steel

被引：15

作者：

Nowak, R

Metev, S

Sepold, C

机构：

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1995年 / 51卷 / 01期

关键词：

wet chemical etching; cw-Nd:YAG laser radiation; titanium; stainless steel;

D O I：

10.1016/0924-4247(96)80050-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Laser-induced wet chemical etching of titanium and stainless steel foils in phosphoric and sulphuric acid was investigated. Focussing of cw-Nd:YAG laser radiation at power levels up to 7 W to a focal spot diameter of about 25 mu m resulted in chemical etching of grooves at speeds up to 90 mu m s(-1) and cutting of foils at velocities of 10-50 mu m s(-1). Aspect ratios up to 2 were obtained. Fabrication of free-standing microstructures is demonstrated.

引用

页码：41 / 45

页数：5

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