FABRICATION OF A ONE-DIMENSIONAL MICROHOLE ARRAY BY ANODIC-OXIDATION OF ALUMINUM

被引：30

作者：

MASUDA, H

NISHIO, K

BABA, N

机构：

[1] Department of Industrial Chemistry, Faculty of Technology, Tokyo Metropolitan University, Hachioji, Tokyo 192-03

来源：

APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 23期

关键词：

D O I：

10.1063/1.110233

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A one-dimensional microhole array with high-aspect ratio was successfully obtained using anodic oxidation of an aluminum oxide/aluminum/glass structure. This process allows the fabrication of an array of microholes less than 1000 angstrom diameter without any exposure mask or resist, and the size of the array can be controlled on the basis of the relationship between the thickness of the aluminum layer and anodizing voltage.

引用

页码：3155 / 3157

页数：3

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