共 11 条
- [1] HAMAMOTO T, 1986, P VLSI S, P67
- [3] Katto H., 1984, International Electron Devices Meeting. Technical Digest (Cat. No. 84CH2099-0), P774
- [4] Ko P. K., 1984, International Electron Devices Meeting. Technical Digest (Cat. No. 84CH2099-0), P88
- [5] Ko P. K., 1986, International Electron Devices Meeting 1986. Technical Digest (Cat. No.86CH2381-2), P292
- [6] TWO-DIMENSIONAL PHOSPHORUS DIFFUSION FOR SOFT DRAINS IN SILICON MOS-TRANSISTORS [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1986, 40 (02): : 101 - 107
- [7] Mizuno T., 1986, International Electron Devices Meeting 1986. Technical Digest (Cat. No.86CH2381-2), P726
- [8] MUHLHOFF HM, 1987, P VLSI S, P57
- [9] MUHLHOFF HM, 1987, 1ST P INT S ULSI TEC, P632
- [10] ORLOWSKI M, 1987, P VLSI S, P51