ZINC-OXIDE FILM SYNTHESIZED BY ECR OXYGEN PLASMA

被引:6
作者
KOKAI, H
KASHIWAGI, K
SAKAMOTO, Y
MORIKAWA, T
MURAYAMA, Y
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 11期
关键词
D O I
10.1143/JJAP.28.2268
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:2268 / 2271
页数:4
相关论文
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    KOKAI, H
    SAKAMOTO, Y
    KASHIWAGI, K
    MORIKAWA, T
    KURAMOCHI, S
    MURAYAMA, Y
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (08): : L1390 - L1391
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