PREPARATION OF HIGH-TC YBACUO THIN-FILMS ON YSZ AND SILICON SUBSTRATES BY RF-MAGNETRON SPUTTERING

被引：8

作者：

DUBREUIL, D

GARRY, G

LEMAITRE, Y

ROGIER, L

DIEUMEGARD, D

机构：

来源：

JOURNAL OF THE LESS-COMMON METALS | 1989年 / 151卷 / 1-2期

关键词：

D O I：

10.1016/0022-5088(89)90331-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：303 / 310

页数：8

共 7 条

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[2]

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CHI, CC .

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[4]

GARRY G, 7E P CIPG 89 ANT FRA

[5]

KORMANN R, JOURNEES ETUDES CERA, P108

[6] EPITAXIAL-GROWTH OF YTTRIA-STABILIZED ZIRCONIA FILMS ON SILICON BY ULTRAHIGH-VACUUM ION-BEAM SPUTTER DEPOSITION [J].

LEGAGNEUX, P ;

GARRY, G ;

DIEUMEGARD, D ;

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SIEJKA, J .

APPLIED PHYSICS LETTERS, 1988, 53 (16) :1506-1508

[7]

WONGNG W, 1987, ADV CERAM MATER, V2, P565

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