REVIEW OF ION-BASED COATING PROCESSES DERIVED FROM THE CATHODIC ARC

被引：53

作者：

SANDERS, DM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.575939

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2339 / 2345

页数：7

共 51 条

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