THE DEPTH DISTRIBUTION FUNCTION IN AUGER XPS ANALYSIS

被引：45

作者：

DWYER, VM

RICHARDS, JM

机构：

[1] Department of Electronic and Electrical Engineering, Loughborough University of Technology, Loughborough

来源：

SURFACE AND INTERFACE ANALYSIS | 1992年 / 18卷 / 07期

关键词：

D O I：

10.1002/sia.740180717

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

An analysis of a recent three-exponential approximation of the depth distribution function (DDF) for quantitative Auger/XPS analysis is presented and a comparison is made with an exact DDF obtained for an analytical solution to the Boltzmann transport equation in the transport approximation. Several problems with the approximate DDF are identified and, using the derived analytical form, an alternative two-exponential DDF is suggested.

引用

页码：555 / 560

页数：6

共 14 条

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