Pervaporation membranes for ethanol-water binary mixtures were prepared by plasma polymerization of perfluoropropane (PFP). The plasma-polymerized thin films were deposited onto porous polysulfone (PS) filters as substrates with an average pore size from 0.1 to 0.45-mu-m. By adding argon carrier to PFP system, fluorine/carbon elemental ratios (F/C) of the produced membranes evaluated by X-ray photoelectron spectroscopy (XPS), showed a maximum value, then slightly decreased at higher partial pressure of Ar. This tendency was recognized more clearly by comparing the summation of -CF3 and -CF2-peak area percentages based on a whole C1s peak area. As a measure of hydrophobicity, this value is more intelligible than the direct F/C ratio. The influences of substrate pore-size, plasma-treatment time and hydrophobicity of the membranes on the separation capability were studied. The ethanol-separation coefficient, (alpha(EtOH)), of PFP membranes increased slightly with decrease of the average pore-size of the substrates, but treatment time did not apparently affect the alpha(EtOH). We classified the prepared membranes into two classes, i.e. the membranes showing higher and lower permeation fluxes than 0.5 kg/m2-hr. The alpha(EtOH) was more evidently observed to increase with membrane hydrophobicity for the former class of PFP membranes. We suggest that, at least, three separation schemes might be necessary to understand the correlations found in each group.