LASER SURFACE ALLOYING FOR PASSIVATION OF TI-PD

被引:20
作者
DRAPER, CW [1 ]
MEYER, LS [1 ]
JACOBSON, DC [1 ]
BUENE, L [1 ]
POATE, JM [1 ]
机构
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
关键词
D O I
10.1016/0040-6090(81)90401-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:237 / 240
页数:4
相关论文
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