DEPOSITION AND CHARACTERIZATION OF DIAMOND, SILICON-CARBIDE AND GALLIUM NITRIDE THIN-FILMS

被引:46
作者
DAVIS, RF
机构
[1] Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695
关键词
D O I
10.1016/0022-0248(94)91266-1
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The extreme thermal and electronic properties of diamond, SiC and GaN provide combinations of attributes which lead to the highest figures of merit for any semiconductor materials for high power, temperature, frequency and optoelectronic applications. The methods of deposition and the results of chemical. structural, microstructural and electrical characterization are briefly reviewed for thin films of these three materials.
引用
收藏
页码:161 / 169
页数:9
相关论文
共 56 条
  • [1] EFFECTS OF AIN BUFFER LAYER ON CRYSTALLOGRAPHIC STRUCTURE AND ON ELECTRICAL AND OPTICAL-PROPERTIES OF GAN AND GA1-XALXN(0-LESS-THAN-X-LESS-THAN-OR-EQUAL-TO-0.4) FILMS GROWN ON SAPPHIRE SUBSTRATE BY MOVPE
    AKASAKI, I
    AMANO, H
    KOIDE, Y
    HIRAMATSU, K
    SAWAKI, N
    [J]. JOURNAL OF CRYSTAL GROWTH, 1989, 98 (1-2) : 209 - 219
  • [2] AKASAKI I, 1992, WIDE BAND GAP SEMICO, V242, P542
  • [3] STIMULATED-EMISSION NEAR ULTRAVIOLET AT ROOM-TEMPERATURE FROM A GAN FILM GROWN ON SAPPHIRE BY MOVPE USING AN AIN BUFFER LAYER
    AMANO, H
    ASAHI, T
    AKASAKI, I
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (02): : L205 - L206
  • [4] P-TYPE CONDUCTION IN MG-DOPED GAN TREATED WITH LOW-ENERGY ELECTRON-BEAM IRRADIATION (LEEBI)
    AMANO, H
    KITO, M
    HIRAMATSU, K
    AKASAKI, I
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (12): : L2112 - L2114
  • [5] ELECTRON-BEAM EFFECTS ON BLUE LUMINESCENCE OF ZINC-DOPED GAN
    AMANO, H
    AKASAKI, I
    KOZAWA, T
    HIRAMATSU, K
    SAWAKI, N
    IKEDA, K
    ISHII, Y
    [J]. JOURNAL OF LUMINESCENCE, 1988, 40-1 : 121 - 122
  • [6] EMERGING TECHNOLOGY OF DIAMOND THIN-FILMS
    BACHMANN, PK
    MESSIER, R
    [J]. CHEMICAL & ENGINEERING NEWS, 1989, 67 (20) : 24 - &
  • [7] GROWTH SECTORS OF CVD DIAMONDS
    BADZIAN, A
    BADZIAN, T
    WANG, XH
    [J]. CARBON, 1990, 28 (06) : 804 - 804
  • [8] THIN-FILM DIAMOND GROWTH MECHANISMS
    BUTLER, JE
    WOODIN, RL
    [J]. PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1993, 342 (1664): : 209 - 224
  • [9] CELLI FG, 1991, ANNU REV PHYS CHEM, V42, P643
  • [10] MECHANISM OF CVD DIAMOND GROWTH ON DIAMOND (111), (110) AND (100) SURFACES
    CHU, CJ
    DEVELYN, MP
    HAUGE, RH
    MARGRAVE, JL
    [J]. CARBON, 1990, 28 (06) : 805 - 805