PREPARATION OF STANDARDS FOR THIN-FILM THICKNESS MEASUREMENTS BY ENERGY DISPERSIVE-X-RAY ANALYSIS

被引:11
作者
KAMMLOTT, GW
机构
关键词
Compendex;
D O I
10.1366/0003702814732689
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
THICKNESS MEASUREMENT
引用
收藏
页码:324 / 328
页数:5
相关论文
共 5 条
  • [1] ABBOTT WH, 1966, 1ST ANN REPORT
  • [2] ANDERSON CA, 1973, MICROPROBE ANAL
  • [3] [Anonymous], 1966, J ELECTROCHEM SOC
  • [4] BIRKS LS, 1971, CHEM ANAL
  • [5] CAMPBELL WE, 1968, P ELECTRICAL CONTACT, P233