共 38 条
[2]
ANGUS JC, 1984, THIN SOLID FILMS, V118, P311, DOI 10.1016/0040-6090(84)90202-5
[4]
BOKROS JC, 1969, CHEM PHYS CARBON, V5, P31
[5]
Chapman B., 1980, GLOW DISCHARGE PROCE
[7]
CATHODE ETCHING RATE IN ABNORMAL GLOW-DISCHARGES
[J].
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
1989, 48 (06)
:573-574
[9]
DISCHER B, 1987, 1987 P E MRS M STRAS, P187