CATHODE ETCHING RATE IN ABNORMAL GLOW-DISCHARGES

被引:5
作者
CZEKAJ, D [1 ]
HOLLMANN, EK [1 ]
KOZIREV, AB [1 ]
VOLPIAS, VA [1 ]
ZAYTSEV, AG [1 ]
机构
[1] VI LENIN ELECT ENGN INST,LENINGRAD 197022,USSR
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1989年 / 48卷 / 06期
关键词
D O I
10.1007/BF00617859
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:573 / 574
页数:2
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