THE INFLUENCE OF PRESSURE ON THE OPERATION OF GLOW-DISCHARGE SPUTTERING SYSTEMS

被引：17

作者：

ABRIL, I

GRASMARTI, A

VALLESABARCA, JA

机构：

[1] Univ de Alicante, Alicante, Spain, Univ de Alicante, Alicante, Spain

来源：

VACUUM | 1987年 / 37卷 / 5-6期

关键词：

SPUTTERING - Pressure Effects;

D O I：

10.1016/0042-207X(87)90318-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The authors analyze various energy transfer processes in glow discharges. The mean-free-paths of energetic particles are compared with characteristic distances in the glow discharge. A computer code is outlined, which incorporates the models developed recently for various processes taking place in the glow discharge. The application of the code to the calculation of various quantities is discussed and some comparisons with published data are made.

引用

页码：391 / 394

页数：4

共 16 条

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[4]

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[5]

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[8] SLOWING DOWN AND THERMALIZATION OF SPUTTERED PARTICLE FLUXES - ENERGY-DISTRIBUTIONS [J].

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GRASMARTI, A ;

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[10] OPTICAL SPECTROSCOPY FOR DIAGNOSTICS AND PROCESS-CONTROL DURING GLOW-DISCHARGE ETCHING AND SPUTTER DEPOSITION [J].

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