SLOWING DOWN AND THERMALIZATION OF SPUTTERED PARTICLE FLUXES - ENERGY-DISTRIBUTIONS

被引：96

作者：

GRASMARTI, A

VALLESABARCA, JA

机构：

来源：

关键词：

D O I：

10.1063/1.332113

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1071 / 1075

页数：5

共 18 条

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