CHARACTERIZATION OF CRYSTALLINE QUALITY OF DIAMOND FILMS BY RAMAN-SPECTROSCOPY

被引:163
作者
YOSHIKAWA, M [1 ]
KATAGIRI, G [1 ]
ISHIDA, H [1 ]
ISHITANI, A [1 ]
ONO, M [1 ]
MATSUMURA, K [1 ]
机构
[1] TORAY INDUSTRIES LTD, ELECTR & IMAGING MAT RES LAB, OTSU, SHIGA 520, JAPAN
关键词
D O I
10.1063/1.101951
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:2608 / 2610
页数:3
相关论文
共 16 条
[1]   RAPID GROWTH OF DIAMOND FILMS BY ARC-DISCHARGE PLASMA CVD [J].
AKATSUKA, F ;
HIROSE, Y ;
KOMAKI, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (09) :L1600-L1602
[2]   INFRARED DETECTION OF GASEOUS SPECIES DURING THE FILAMENT-ASSISTED GROWTH OF DIAMOND [J].
CELII, FG ;
PEHRSSON, PE ;
WANG, HT ;
BUTLER, JE .
APPLIED PHYSICS LETTERS, 1988, 52 (24) :2043-2045
[3]   STRESS-INDUCED SHIFTS OF FIRST-ORDER RAMAN FREQUENCIES OF DIAMOND AND ZINC-BLENDE-TYPE SEMICONDUCTORS [J].
CERDEIRA, F ;
BUCHENAUER, CJ ;
CARDONA, M ;
POLLAK, FH .
PHYSICAL REVIEW B-SOLID STATE, 1972, 5 (02) :580-+
[4]   DIAMOND CRYSTAL-GROWTH BY PLASMA CHEMICAL VAPOR-DEPOSITION [J].
CHANG, CP ;
FLAMM, DL ;
IBBOTSON, DE ;
MUCHA, JA .
JOURNAL OF APPLIED PHYSICS, 1988, 63 (05) :1744-1748
[5]  
DRESSELHAUS MS, 1982, TOP APPL PHYS, V51, P3
[6]   A LATTICE THEORY OF MORPHIC EFFECTS IN CRYSTALS OF DIAMOND STRUCTURE [J].
GANESAN, S ;
MARADUDI.AA ;
OITMAA, J .
ANNALS OF PHYSICS, 1970, 56 (02) :556-&
[7]   EFFECT OF UNIAXIAL STRESS ON ZONE-CENTER OPTICAL PHONON OF DIAMOND [J].
GRIMSDITCH, MH ;
ANASTASSAKIS, E ;
CARDONA, M .
PHYSICAL REVIEW B, 1978, 18 (02) :901-904
[8]   BRILLOUIN-SCATTERING IN DIAMOND [J].
GRIMSDITCH, MH ;
RAMDAS, AK .
PHYSICAL REVIEW B, 1975, 11 (08) :3139-3148
[9]   DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA [J].
KAMO, M ;
SATO, Y ;
MATSUMOTO, S ;
SETAKA, N .
JOURNAL OF CRYSTAL GROWTH, 1983, 62 (03) :642-644
[10]   SYNTHESIS OF DIAMONDS BY USE OF MICROWAVE PLASMA CHEMICAL-VAPOR DEPOSITION - MORPHOLOGY AND GROWTH OF DIAMOND FILMS [J].
KOBASHI, K ;
NISHIMURA, K ;
KAWATE, Y ;
HORIUCHI, T .
PHYSICAL REVIEW B, 1988, 38 (06) :4067-4084