RAPID GROWTH OF DIAMOND FILMS BY ARC-DISCHARGE PLASMA CVD

被引：63

作者：

AKATSUKA, F ^{[1
]}

HIROSE, Y ^{[1
]}

KOMAKI, K ^{[1
]}

机构：

[1] SHOWA DENKO KK, CENT RES LAB, OTA KU, TOKYO 146, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 09期

关键词：

D O I：

10.1143/JJAP.27.L1600

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L1600 / L1602

页数：3

共 15 条

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[8] SYNTHESIS OF DIAMOND FILMS IN A RF INDUCTION THERMAL PLASMA
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[9] VAPOR-DEPOSITION OF DIAMOND PARTICLES FROM METHANE
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SETAKA, N
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (04): : L183 - L185
[10] GROWTH OF DIAMOND THIN-FILMS BY ELECTRON-ASSISTED CHEMICAL VAPOR-DEPOSITION AND THEIR CHARACTERIZATION
SAWABE, A
INUZUKA, T
[J]. THIN SOLID FILMS, 1986, 137 (01) : 89 - 99

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