SYNTHESIS OF DIAMOND FILMS IN A RF INDUCTION THERMAL PLASMA

被引：176

作者：

MATSUMOTO, S

HINO, M

KOBAYASHI, T

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 10期

关键词：

D O I：

10.1063/1.98851

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：737 / 739

页数：3

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