GROWTH OF DIAMOND PARTICLES FROM METHANE-HYDROGEN GAS

被引:604
作者
MATSUMOTO, S
SATO, Y
TSUTSUMI, M
SETAKA, N
机构
关键词
D O I
10.1007/BF01203472
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:3106 / 3112
页数:7
相关论文
共 17 条
[1]   ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J].
AISENBERG, S ;
CHABOT, R .
JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) :2953-+
[2]   ELECTRICAL AND OPTICAL-PROPERTIES OF AMORPHOUS-CARBON PREPARED BY GLOW-DISCHARGE TECHNIQUE [J].
ANDERSON, DA .
PHILOSOPHICAL MAGAZINE, 1977, 35 (01) :17-26
[3]   GROWTH OF DIAMOND SEED CRYSTALS BY VAPOR DEPOSITION [J].
ANGUS, JC ;
WILL, HA ;
STANKO, WS .
JOURNAL OF APPLIED PHYSICS, 1968, 39 (06) :2915-&
[4]   DIAMOND-LIKE CARBON-FILMS PRODUCED IN A BUTANE PLASMA [J].
BERG, S ;
ANDERSSON, LP .
THIN SOLID FILMS, 1979, 58 (01) :117-120
[5]  
Deryagin B. V., 1976, Soviet Physics - Doklady, V21, P676
[6]  
Eversole W. G., 1962, US Patent, Patent No. [3,030,187, 3030187]
[7]  
Eversole W. G., 1962, US Patent, Patent No. [3,030,188, 3030188]
[8]   SOME TRENDS IN PREPARING FILM STRUCTURES BY ION-BEAM METHODS [J].
GAUTHERIN, G ;
WEISSMANTEL, C .
THIN SOLID FILMS, 1978, 50 (MAY) :135-144
[9]   DEPOSITION OF HARD AND INSULATING CARBONACEOUS FILMS ON AN RF TARGET IN A BUTANE PLASMA [J].
HOLLAND, L ;
OJHA, SM .
THIN SOLID FILMS, 1976, 38 (02) :L17-L19
[10]   THERMODYNAMISCHE BETRACHTUNGEN ZUR KOHLENSTOFFABSCHEIDUNG BEI DER PYROLYSE GASFORMIGER KOHLENSTOFFVERBINDUNGEN [J].
LERSMACHER, B ;
LYDTIN, H ;
KNIPPENBERG, WF ;
MOORE, AW .
CARBON, 1967, 5 (03) :205-+