DIFFUSE-SCATTERING OF X-RAYS FROM NONIDEAL LAYERED STRUCTURES

被引：15

作者：

KOPECKY, M

机构：

[1] Institute of Physics, Czech Academy of Sciences, 180 40 Prague

来源：

JOURNAL OF APPLIED PHYSICS | 1995年 / 77卷 / 06期

关键词：

D O I：

10.1063/1.358762

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A new theory of nonspecular x-ray scattering from layered systems with random rough interfaces based on the distorted-wave Born approximation is presented. Calculations of the diffuse scattering from a single gold layer and two W/Si multilayer mirrors has been carried out. The theory explains the existence of maxima and minima in the angular distribution of diffusely scattered intensity resulting from standing-wave-enhanced scattering and other dynamical effects. The influence of the mutual correlation between individual interface profiles on x-ray scattering is discussed. © 1995 American Institute of Physics.

引用

页码：2380 / 2387

页数：8

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