THE MECHANISM OF FORMATION, THE STRUCTURE AND THE PROPERTIES OF AMORPHOUS FILMS

被引：19

作者：

GUTZOW, I

AVRAMOV, I

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(81)90118-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：203 / 221

页数：19

共 47 条

AVRAMOV, I ;

GUTZOW, I .

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[3]

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[4] FORMATION OF AMORPHOUS FILMS [J].

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1970, 7 (03) :385-&

[5]

BRYANT GW, 1959, J PHYS CHEM SOLIDS, V12, P189

[6]

Chopra K.L, 1969, THIN FILM PHENOMENA

[7]

CONJEAUD P, 1954, CR HEBD ACAD SCI, V238, P2075

[8]

Defay R, 1966, SURFACE TENSION ADSO

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DOWELL, LG ;

RINFRET, AP .

[10]

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