THE EFFECT OF SPATIAL-DISPERSION OF THE DIELECTRIC PERMITTIVITY ON THE CAPACITANCE OF THIN INSULATING FILMS - NON-LINEAR DEPENDENCE OF THE INVERSE CAPACITANCE ON FILM THICKNESS

被引：23

作者：

KORNYSHEV, AA ^{[1
]}

VOROTYNTSEV, MA ^{[1
]}

ULSTRUP, J ^{[1
]}

机构：

[1] TECH UNIV DENMARK,CHEM DEPT A,DK-2800 LYNGBY,DENMARK

来源：

THIN SOLID FILMS | 1981年 / 75卷 / 02期

关键词：

D O I：

10.1016/0040-6090(81)90445-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：105 / 118

页数：14

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